| 品牌 | 其他品牌 | 價(jià)格區間 | 0-5萬(wàn) |
|---|---|---|---|
| 產(chǎn)地類(lèi)別 | 進(jìn)口 | 應用領(lǐng)域 | 綜合 |
薄層方塊電阻測量?jì)x-非接觸式
昊量光電新推出用于導電薄膜和薄金屬層方塊電阻測量的非接觸式薄膜四方針?lè )綁K電阻方阻測量?jì)xEddyCus TF Series，這款非接觸式薄膜四方針?lè )綁K電阻方阻測量?jì)x可以非接觸式實(shí)時(shí)測量，對導電薄膜和金屬方塊電阻精確測量，表征已被隱藏和封裝的導電層，并把測量數據保存和導出。 可用于方塊電阻，方阻測量，四探針測試，四探針?lè )阶铚y量。
薄層方塊電阻測量?jì)x-非接觸式主要測試對象：
鍍膜建筑玻璃，如LowE
顯示器，觸摸屏和平板顯示器
OLED和LED
智能玻璃
石墨烯層
光伏晶圓和電池
半導體晶片
金屬化層和晶圓金屬化
電池電極
導電涂布紙和導電紡織品
非接觸式單點(diǎn)方阻測試儀EddyCus TF Lab 2020SR
EddyCus TF Lab 2020SR是非接觸式單點(diǎn)薄層電阻測量系統。該裝置包含一個(gè)渦流傳感器組，感應弱電流到導電薄膜和材料。非接觸式薄膜四方針?lè )綁K電阻方阻測量?jì)x試樣中的感應電流產(chǎn)生與測量對象的片電阻相關(guān)的電磁場(chǎng)。電渦流技術(shù)不依賴(lài)于表面特征或形貌。此外，非接觸式單點(diǎn)方阻測試儀不需要如已知的2或4點(diǎn)探針測試(2PP, 4PP)或霍爾效應或范德波測量一樣進(jìn)行任何形式的充分的樣品接觸或備樣。非接觸式單點(diǎn)方阻測試儀既不需要設置測試結構，也不受表面粗糙度或非導電封裝或鈍化層的影響。此外，測量不會(huì )對被測薄膜產(chǎn)生物理影響。渦流儀器不存在機械磨損，使用壽命長(cháng)。它的獨立性與接觸質(zhì)量和它的高速允許實(shí)現高重復性和準確性，有利于在研發(fā)和測試實(shí)驗室的各種薄膜的系統質(zhì)量保證。EddyCus工具可以由具有各種數據記錄和導出功能的SURAGUS軟件驅動(dòng)，也可以由SURAGUS軟件開(kāi)發(fā)套件驅動(dòng)的客戶(hù)軟件驅動(dòng)。
非接觸式單點(diǎn)方阻測試儀軟件和設備控制：
非常用戶(hù)友好的軟件
直觀(guān)的觸摸顯示導航
實(shí)時(shí)測量板材電阻和層厚
軟件輔助手動(dòng)映射選項
各種數據保存和導出選項
非接觸式薄膜四方針?lè )綁K電阻方阻測量?jì)x產(chǎn)品規格表
| Measurement technology | Non-contact eddy current sensor |
| substrates | Foils, glass, wafer, etc. |
| Substrate area | 8 inch / 204 mm x 204 mm (open on three sides) |
| Max. sample thickness / sensor gap | 3 / 5 / 10 / 25 mm (defined by the thickest sample) |
| Thickness measurement range of metal films (e.g. copper) | 2 nm – 2 mm (in accordance with sheet resistance (cf. our calculator)) |
| Device dimensions (w/h/d) | 11.4" x 5.5" x 17.5" / 290 mm x 140 mm x 445 mm |
| Weight | 10 kg |
| Further available features | Sheet resistance measurement / metal thickness monitor |
| VLSR | LSR | MSR | HSR | VHSR | |
|---|---|---|---|---|---|
| 6 decades are measurable by one sensor, but with slightly affected accuracy | |||||
| Range [Ohm/sq] | 0.0001 – 0.1 | 0.1 – 10 | 0.1 – 100 | 10 – 2000 | 1,000 – 200,000 |
| Accuracy / Bias | ± 1% | ± 1 – 3% | ± 3 – 5% | ||
| Repeatability (2σ) | < 0.3% | < 0.5% | < 0.3% | ||
| VLSR – Very Low Sheet Resistance , LSR – Low Sheet Resistance , MSR – Medium Sheet Resistance , HSR – High Sheet Resistance , VHSR – Very High Sheet Resistanc | |||||
非接觸式薄膜四方針?lè )綁K電阻方阻測量?jì)x
非接觸式方阻成像儀EddyCus TF Map 2530SR
EddyCus TF Map 2530SR是一種非接觸式薄層電阻映射系統。該設備配備了一個(gè)運動(dòng)的渦流傳感器，每次掃描可測量高達90000 (300 x 300)測量點(diǎn)的方塊電阻。由于這種技術(shù)不需要與標本進(jìn)行物理接觸，該設備可以在飛行運動(dòng)中進(jìn)行測量。此外，非接觸式單點(diǎn)方阻測試儀具有很高的準確性，因為它是獨立于任何接觸質(zhì)量。非接觸式薄膜四方針?lè )綁K電阻方阻測量?jì)x樣品中測量點(diǎn)的高密度確保了沒(méi)有遺漏任何效果或缺陷。此外，綜合分析功能支持生產(chǎn)和研發(fā)實(shí)驗室中各種薄膜的系統質(zhì)量保證。
產(chǎn)品規格：
| Measurement technology | Non-contact eddy current sensor |
| Substrates | Wafer, glass, foils etc. |
| Max. scanning area | 12 inch / 300 mm x 300 mm (larger upon request) |
| Edge effect correction / exclusion | 2 – 10 mm (depending on size, range, setup and requirements) |
| Max. sample thickness / sensor gap | 3 / 5 / 10 / 15 mm (defined by the thickest sample) |
| Thickness measurement of metal films (e.g. aluminum, copper) | 2 nm – 2 mm (in accordance with sheet resistance ()) |
| Scanning pitch | 1 / 2.5 / 5 / 10 / 25 mm (other upon request) |
| Measurement points per time (square shaped samples) | 100 measurement points in 0.5 minutes 10,000 measurement points in 3 minutes |
| Scanning time | 8 inch / 200 mm x 200 mm in 1 to 10 minutes (1 – 10 mm pitch) 12 inch / 300 mm x 300 mm in 2 to 6 minutes (2.5 – 25 mm pitch) |
| Device dimensions (w/h/d) | 31.5" x 19.1" x 33.5" / 785 mm x 486 mm x 850 mm |
| Weight | 90 kg |
| Further available features | Metal thickness imaging, anisotropy and sheet resistance sensor |
| VLSR | LSR | MSR | HSR | VHSR | |
|---|---|---|---|---|---|
| 6 decades are measurable by one sensor, but with slightly affected accuracy | |||||
| Range [Ohm/sq] | 0.0001 – 0.1 | 0.1 – 10 | 0.1 – 100 | 10 – 2,000 | 1,000 – 200,000 |
| Accuracy / Bias | ± 1% | ± 1 – 3% | ± 3 – 5% | ||
| Repeatability (2σ) | < 0.5% | < 1% | < 0.5% | ||
| VLSR – Very Low Sheet Resistance , LSR – Low Sheet Resistance , MSR – Medium Sheet Resistance , HSR – High Sheet Resistance , VHSR – Very High Sheet Resistance | |||||
便攜式方塊電阻測試儀
EddyCus TF便攜式1010SR專(zhuān)用于工業(yè)環(huán)境中的接觸片電阻測量。它使各種行業(yè)的手工質(zhì)量保證成為可能。
| Measurement technology | Eddy current sensor |
| Measurement mode | Realtime at constant distance / contact |
| Substrates | Glass, foils etc. |
| Substrate sizes | Flat samples > 150 mm x 150 mm (6 inch x 6 inch) Curved editions are available for several applications (windshields etc.) |
| Measurement spot / high sensitivity zone | 40 mm diameter (1.6 inch) |
| Power | Lithium ion battery up to 20 h |
| Sheet resistance range (five setups available) | Type very low: 0.001 – 0.1 Ohm/sq Type low: 0.04 – 0.1 Ohm/sq Type standard: 0.3 – 30 Ohm/sq Type high: 0.3 – 50 Ohm/sq Type very high: 0.3 – 100 Ohm/sq |
| Thickness measurement of thin films (e.g. copper) | Additional feature, available range is 5 nm – 500 µm (in accordance with sheet resistance) |
| Emissivity range | Additional feature, available range is 0.003 – 0.5 |
| Accuracy (for planar solid surfaces, e.g. glass) | 0.001 – 50 Ohm/sq: < 3% 50 – 100 Ohm/sq: < 5% |
| DISPlay | 2.8 inch colored touch screen |
| Device dimensions (w/h/d) | 3.5" x 7" x 1.9" / 87 mm x 178 mm x 48 mm |
| Weight | 340 g |
| Interfaces | Bluetooth (optional) + data center |
更多詳情請聯(lián)系昊量光電/歡迎直接聯(lián)系昊量光電
關(guān)于昊量光電：
上海昊量光電設備有限公司是光電產(chǎn)品專(zhuān)業(yè)代理商，產(chǎn)品包括各類(lèi)激光器、光電調制器、光學(xué)測量設備、光學(xué)元件等，涉及應用涵蓋了材料加工、光通訊、生物醫療、科學(xué)研究、國防、量子光學(xué)、生物顯微、物聯(lián)傳感、激光制造等；可為客戶(hù)提供完整的設備安裝，培訓，硬件開(kāi)發(fā)，軟件開(kāi)發(fā)，系統集成等服務(wù)。
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